| 000 | 00416nam a2200145Ia 4500 | ||
|---|---|---|---|
| 001 | 524 | ||
| 005 | 20261006003446.0 | ||
| 008 | 120911s9999 xx 000 0 und d | ||
| 020 | _a0071002820 | ||
| 082 | _a621.38173 RUS | ||
| 100 |
_aRuska, W.Scot _9953 |
||
| 245 | _aMicroelectronic processing : an introduction to the manufacture of integrated circuits | ||
| 260 | _aMcgraw Hill | ||
| 650 |
_aElectronic instruments _9954 |
||
| 999 |
_c524 _d524 |
||