Ruska, W.Scot <br/><br/>
Microelectronic processing : an introduction to the manufacture of integrated circuits 

 - Mcgraw Hill 
<br/><br/><label>ISBN: </label>0071002820 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic instruments
<br/><br/><label>Dewey Class. No.: </label>621.38173 RUS