00322nam a2200133Ia 4500001000500000005001700005008004100022020001500063082001400078100001700092245004900109260001900158650001100177285720261006003646.0120911s9999    xx            000 0 und d  a0412465906  a533.5 DEL  aT.A. Delchar  aVacuum physics and techniques / Delchar T.A.  aChapman & Hall  aVacuum